Phase-Only Liquid-Crystal-on-Silicon Spatial-Light-Modulator Uniformity Measurement with Improved Classical Polarimetric Method

The classical polarimetric method has been widely used in liquid crystal on silicon (LCoS) phase measurement with a simple optical setup. However, due to interference caused by LCoS cover glass reflections, the lacks accuracy for uniformity measurements. This paper is aimed at mathematically analyzing errors non-ideal reflections and proposing procedures reduce or eliminate such errors. discussed three conditions, including ideal condition no from glass, only front reflection back glass. It discovered that backward makes largest contribution overall error, it main obstacle high-quality Several procedures, alignment, LC layer thickness measurement, estimation method, are proposed, making more qualitative consistent.